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- 1.0396844 - ÚFE 2014 RIV US eng C - Conference Paper (international conference)
Lomov, A. A. - Grym, Jan - Nohavica, Dušan - Orehov, A.S. - Vasil'ev, A. L. - Novikov, D. V.
High-resolution X-ray diffraction and electron microscopy study of porous GaAs substrates.
International Conference Micro- and Nano-Electronics 2012 (Proc. SPIE 8700). BELLINGHAM: SPIE, 2013 - (Orlikovsky, A.). ISBN 9780819494870. ISSN 0277-786X.
[International Conference Micro- and Nano-Electronics 2012. Zvenlgorod (RU), 01.10.2012-5.10.2012]
R&D Projects: GA MŠMT LD12014
Institutional support: RVO:67985882
Keywords : Etching * Diffraction * Galllium arsenide
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0224551