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- 1.0517476 - FZÚ 2020 RIV US eng M - Monography Chapter
Pokorný, Petr - Novotný, Michal
Radicals and ions in magnetron sputtering discharges in noble gases.
Horizons in World Physics. New York: Nova Science Publishers Inc, 2019 - (Reimer, A.), s. 56-116. 297. ISBN 978-1-53614-712-4
R&D Projects: GA MŠMT(CZ) LO1409; GA ČR GA16-22092S; GA ČR GA18-17834S; GA ČR GA18-09347S
Institutional support: RVO:68378271
Keywords : magnetron sputtering * noble gases * discharge * radicals * ions * contamination * mass spectrometry
OECD category: Fluids and plasma physics (including surface physics)
https://novapublishers.com/shop/horizons-in-world-physics-volume-297/
Permanent Link: http://hdl.handle.net/11104/0302782