Search results
- 1.0024675 - FZÚ 2006 RIV LU eng V - Research Report
Boháč, Petr
Preparation of wear resistant layers with low friction by magnetron sputtering and RF plasma assisted chemical vapor deposition systems with hollow cathodes (516.50).
[Příprava otěruvzdorných vrstev s nízkým třením pomocí magnetronů a RF plazma-chemických systémů s dutými katodami.]
Luxembourg: Office for Official Publications of the European Communities, 2001. 4 s. ISBN 92-894-0639-9
R&D Projects: GA MŠMT(CZ) OC 516.50
Institutional research plan: CEZ:AV0Z1010914
Keywords : magnetron sputtering, ECR PA CVD * low pressure plasma jet systems * amorphous carbon * carbon nitride films * tribological properties
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0115178