Search results
- 1.0464389 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
Krátký, Stanislav - Meluzín, Petr - Horáček, Miroslav - Kolařík, Vladimír - Matějka, Milan - Chlumská, Jana - Král, Stanislav
Blaze Gratings with a Ribbed Back Slope.
NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 757-761. ISBN 978-80-87294-71-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : nano patterning * blazed diffraction grating * Gaussian-type beam * variable-shaped beam * electron beam writer
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0270770 - 2.0464388 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Král, Stanislav
Parameter Optimization of Multi-Level Diffraction Gratings.
NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 751-756. ISBN 978-80-87294-71-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
R&D Projects: GA MPO FR-TI1/576; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : e-beam pattern generator * variable shaped beam * grayscale lithography * multi-level grating
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0270769 - 3.0452395 - ÚPT 2016 RIV CZ cze J - Journal Article
Krátký, Stanislav - Urbánek, Michal - Chlumská, Jana - Matějka, Milan - Meluzín, Petr - Kolařík, Vladimír - Horáček, Miroslav
Kombinace elektronové litografie s gaussovským svazkem a s proměnným tvarovaným svazkem.
[Combination of electron lithography with Gaussian and shaped beams.]
Jemná mechanika a optika. Roč. 60, č. 1 (2015), s. 10-13. ISSN 0447-6441
R&D Projects: GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : e-beam writer * Gausssian beam * variable shaped beam
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0253409 - 4.0437838 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Horáček, Miroslav - Krátký, Stanislav - Urbánek, Michal - Kolařík, Vladimír - Meluzín, Petr - Matějka, Milan - Chlumská, Jana
Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam.
NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
[NANOCON 2014. International Conference /6./. Brno (CZ), 05.11.2014-07.11.2014]
R&D Projects: GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01; GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : e-beam writer * Gaussian beam * variable shaped beam
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0241322