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- 1.0358590 - ÚPT 2012 RIV NL eng J - Journal Article
Oral, Martin - Lencová, Bohumila
Correction of sample tilt in FIB instruments.
Nuclear Instruments & Methods in Physics Research Section A. Roč. 645, č. 1 (2011), s. 130-135. ISSN 0168-9002. E-ISSN 1872-9576
R&D Projects: GA AV ČR IAA100650805
Institutional research plan: CEZ:AV0Z20650511
Keywords : sample tilt * extraction field * correction of elliptical beam shape * calculation of intensity distribution * focused ion beams
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.207, year: 2011
Permanent Link: http://hdl.handle.net/11104/0196576