Search results
- 1.0486358 - FZÚ 2018 RIV US eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentev, Vasyl - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates.
Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). New York: IEEE, 2014 - (Shpotyuk, M.), s. 19-20, č. článku 6912320. ISBN 978-1-4799-5961-7.
[2014 IEEE International Conference On Oxide Materials For Electronic Engineering (OMEE). Lviv (UA), 26.05.2014-30.05.2014]
Institutional support: RVO:68378271
Keywords : complex oxide film deposition * multitarget reactive sputtering * flexible polymer substrate * composition profile * piezoresponse force microscopy * PZT
OECD category: Fluids and plasma physics (including surface physics)
http://ieeexplore.ieee.org/document/6912320/
Permanent Link: http://hdl.handle.net/11104/0281194 - 2.0450607 - FZÚ 2016 RIV CH eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentiev, V. - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates.
Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230. Pfaffikon: Scientific.Net, 2015 - (Ubizskii, S.; Vasylechko, L.; Zhydachevskii, Y.), s. 3-7. Solid State Phenomena, 230. ISBN 978-3-03835-428-4. ISSN 1662-9779.
[Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014). Lviv (UA), 26.05.2014-30.05.2014]
Institutional support: RVO:68378271
Keywords : complex oxide film deposition * PZT * multitarget reactive magnetron sputtering * flexible polymer substrate * XPS * PFM
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0251878