Search results
- 1.0486358 - FZÚ 2018 RIV US eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentev, Vasyl - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates.
Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). New York: IEEE, 2014 - (Shpotyuk, M.), s. 19-20, č. článku 6912320. ISBN 978-1-4799-5961-7.
[2014 IEEE International Conference On Oxide Materials For Electronic Engineering (OMEE). Lviv (UA), 26.05.2014-30.05.2014]
Institutional support: RVO:68378271
Keywords : complex oxide film deposition * multitarget reactive sputtering * flexible polymer substrate * composition profile * piezoresponse force microscopy * PZT
OECD category: Fluids and plasma physics (including surface physics)
http://ieeexplore.ieee.org/document/6912320/
Permanent Link: http://hdl.handle.net/11104/0281194 - 2.0450607 - FZÚ 2016 RIV CH eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentiev, V. - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates.
Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230. Pfaffikon: Scientific.Net, 2015 - (Ubizskii, S.; Vasylechko, L.; Zhydachevskii, Y.), s. 3-7. Solid State Phenomena, 230. ISBN 978-3-03835-428-4. ISSN 1662-9779.
[Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014). Lviv (UA), 26.05.2014-30.05.2014]
Institutional support: RVO:68378271
Keywords : complex oxide film deposition * PZT * multitarget reactive magnetron sputtering * flexible polymer substrate * XPS * PFM
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0251878 - 3.0364652 - FZÚ 2012 RIV CH eng J - Journal Article
Suchaneck, G. - Labitzke, R. - Adolphi, B. - Jastrabík, Lubomír - Adámek, Petr - Drahokoupil, Jan - Hubička, Zdeněk - Kiselev, D.A. - Kholkin, A. L. - Gerlach, G. - Dejneka, Alexandr
Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering.
Surface and Coatings Technology. Roč. 205, č. 2 (2011), S241-S244. ISSN 0257-8972
R&D Projects: GA ČR GC202/09/J017; GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : pulsed DC reactive sputtering * RF reactive sputtering * complex oxide film deposition * polymer substrate
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.867, year: 2011
Permanent Link: http://hdl.handle.net/11104/0200083