Search results
- 1.0567159 - FZÚ 2023 RIV CH eng J - Journal Article
Schulze, Ch. - Li, H. - Mohn, L. - Müller, Martin - Benedikt, J.
Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions.
Plasma. Roč. 5, č. 3 (2022), s. 295-305. E-ISSN 2571-6182
Research Infrastructure: CzechNanoLab - 90110
Institutional support: RVO:68378271
Keywords : capacitively coupled plasma * inductively coupled plasma * rf bias * ion energy distribution * energy-selective mass spectrometry
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Method of publishing: Open access
Permanent Link: https://hdl.handle.net/11104/0338436File Download Size Commentary Version Access 0567159.pdf 0 3.6 MB CC Licence Publisher’s postprint open-access - 2.0432632 - FZÚ 2015 RIV US eng J - Journal Article
Domonkos, Mária - Ižák, Tibor - Babchenko, Oleg - Varga, Marián - Hruška, Karel - Kromka, Alexander
Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching.
Advanced Science, Engineering and Medicine. Roč. 6, č. 7 (2014), s. 780-784. ISSN 2164-6627
R&D Projects: GA ČR GAP108/12/0910; GA ČR GAP108/12/0996; GA MPO FR-TI2/736
Institutional support: RVO:68378271
Keywords : micro- and nanocrystalline diamond * capacitively coupled plasma * reactive ion etching * nanostructuring * scanning electron microscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0237011 - 3.0359628 - FZÚ 2012 CZ eng A - Abstract
Ižák, Tibor - Kromka, Alexander - Babchenko, Oleg - Ledinský, Martin - Hruška, Karel - Verveniotis, Elisseos
Comparative study on dry etching of polycrystalline diamond thin films in different plasma systems.
13th Joint Vacuum Conference - Programme and book of abstract. Brno: Tribun EU s.r.o., 2010 - (Vesely, M.; Vincze, A.; Vavra, I.). s. 73. ISBN 978-80-7399-969-8.
[Joint Vacuum Conference /13./. 20.06.2010-24.06.2010, Strbske Pleso]
R&D Projects: GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902; GA MŠMT LC510; GA AV ČR(CZ) KAN400480701; GA AV ČR KAN400100652
Institutional research plan: CEZ:AV0Z10100521
Keywords : polycrystalline diamond * capacitively coupled plasma * reactive ion etching * nanostructuring
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0197378