0561204 - FZÚ 2023 RIV RU eng J - Journal Article
Rodionov, A.A. - Starinskiy, S.V. - Shukhov, Y.G. - Bulgakov, Alexander
Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas.
Thermophysics and Aeromechanics. Roč. 28, č. 4 (2021), s. 549-554. ISSN 0869-8643. E-ISSN 1531-8699
Institutional support: RVO:68378271
Keywords : pulsed laser deposition * thin films * non-stoichiometric silicon oxide * laser ablation in background gas
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 0.824, year: 2021
Method of publishing: Limited access
https://doi.org/10.1134/S0869864321040089
Permanent Link: https://hdl.handle.net/11104/0333878
Rodionov, A.A. - Starinskiy, S.V. - Shukhov, Y.G. - Bulgakov, Alexander
Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas.
Thermophysics and Aeromechanics. Roč. 28, č. 4 (2021), s. 549-554. ISSN 0869-8643. E-ISSN 1531-8699
Institutional support: RVO:68378271
Keywords : pulsed laser deposition * thin films * non-stoichiometric silicon oxide * laser ablation in background gas
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 0.824, year: 2021
Method of publishing: Limited access
https://doi.org/10.1134/S0869864321040089
Permanent Link: https://hdl.handle.net/11104/0333878