0533159 - FZÚ 2021 RIV GB eng J - Journal Article
Vokoun, David - Kadeřávek, Lukáš - Balogová, Jarmila - Fekete, Ladislav - Landa, Michal - Drahokoupil, Jan - Němeček, J. - Heller, Luděk
Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor.
Smart Materials and Structures. Roč. 29, č. 1 (2020), s. 1-10, č. článku 015001. ISSN 0964-1726. E-ISSN 1361-665X
R&D Projects: GA ČR(CZ) GA17-05360S; GA ČR GA18-03834S; GA ČR(CZ) GA17-05360S; GA MŠMT(CZ) LO1409; GA MŠMT(CZ) LM2015088
Grant - others:FUNBIO(XE) CZ.2.16/3.1.00/21568
Institutional support: RVO:68378271 ; RVO:61388998
Keywords : NiTi film * Xe FIB * MEMS * AFM * resonant ultrasound spectroscopy * sensor fabrication
OECD category: Materials engineering; Materials engineering (UT-L)
Impact factor: 3.585, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-665X/ab4e0c
Permanent Link: http://hdl.handle.net/11104/0311637
Vokoun, David - Kadeřávek, Lukáš - Balogová, Jarmila - Fekete, Ladislav - Landa, Michal - Drahokoupil, Jan - Němeček, J. - Heller, Luděk
Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor.
Smart Materials and Structures. Roč. 29, č. 1 (2020), s. 1-10, č. článku 015001. ISSN 0964-1726. E-ISSN 1361-665X
R&D Projects: GA ČR(CZ) GA17-05360S; GA ČR GA18-03834S; GA ČR(CZ) GA17-05360S; GA MŠMT(CZ) LO1409; GA MŠMT(CZ) LM2015088
Grant - others:FUNBIO(XE) CZ.2.16/3.1.00/21568
Institutional support: RVO:68378271 ; RVO:61388998
Keywords : NiTi film * Xe FIB * MEMS * AFM * resonant ultrasound spectroscopy * sensor fabrication
OECD category: Materials engineering; Materials engineering (UT-L)
Impact factor: 3.585, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-665X/ab4e0c
Permanent Link: http://hdl.handle.net/11104/0311637