0437315 - FZÚ 2015 RIV DE eng J - Journal Article
Klusoň, J. - Kudrna, P. - Kolpaková, A. - Picková, I. - Hubička, Zdeněk - Tichý, M.
Experimental study of the discharge in the low pressure plasma jet sputtering system.
Contributions to Plasma Physics. Roč. 53, č. 1 (2013), s. 10-15. ISSN 0863-1042. E-ISSN 1521-3986
Institutional support: RVO:68378271
Keywords : hollow cathode * plasma jet sputtering system * Langmuir probe
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.983, year: 2013
Permanent Link: http://hdl.handle.net/11104/0240876
Klusoň, J. - Kudrna, P. - Kolpaková, A. - Picková, I. - Hubička, Zdeněk - Tichý, M.
Experimental study of the discharge in the low pressure plasma jet sputtering system.
Contributions to Plasma Physics. Roč. 53, č. 1 (2013), s. 10-15. ISSN 0863-1042. E-ISSN 1521-3986
Institutional support: RVO:68378271
Keywords : hollow cathode * plasma jet sputtering system * Langmuir probe
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.983, year: 2013
Permanent Link: http://hdl.handle.net/11104/0240876