0390588 - FZÚ 2013 RIV CN eng A - Abstract
Novotný, Michal - Bulíř, Jiří - Lančok, Ján - Pokorný, P. - Piksová, K. - Fekete, Ladislav - Musil, Jindřich - Čekada, M.
In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film.
The 8th Asian - European International Conference on Plasma Surface Engineering. AEPSE 2011. Dalian: AJC PSE, EJC PISE, 2011 - (Lei, M.). 216 O-101
[AEPSE 2011. The 8th Asian - European International Conference on Plasma Surface Engineering. 19.09.2011-22.09.2011, Dalian]
R&D Projects: GA ČR(CZ) GAP108/11/1298; GA ČR(CZ) GAP108/11/0958; GA MŠMT(CZ) MEB091125; GA ČR GP202/09/P324
Institutional research plan: CEZ:AV0Z10100522
Keywords : silver * magnetron sputtering * in-situ monitoring * plasma characterization
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0219453
Novotný, Michal - Bulíř, Jiří - Lančok, Ján - Pokorný, P. - Piksová, K. - Fekete, Ladislav - Musil, Jindřich - Čekada, M.
In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film.
The 8th Asian - European International Conference on Plasma Surface Engineering. AEPSE 2011. Dalian: AJC PSE, EJC PISE, 2011 - (Lei, M.). 216 O-101
[AEPSE 2011. The 8th Asian - European International Conference on Plasma Surface Engineering. 19.09.2011-22.09.2011, Dalian]
R&D Projects: GA ČR(CZ) GAP108/11/1298; GA ČR(CZ) GAP108/11/0958; GA MŠMT(CZ) MEB091125; GA ČR GP202/09/P324
Institutional research plan: CEZ:AV0Z10100522
Keywords : silver * magnetron sputtering * in-situ monitoring * plasma characterization
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0219453