0386112 - ÚPT 2013 RIV US eng C - Conference Paper (international conference)
Hrabina, Jan - Lazar, Josef - Číp, Ondřej
Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations.
Optical Micro- and Nanometrology IV, (Proceedings of SPIE ). Vol. 8430. Bellingham: SPIE, 2012, 84301D:1-9. Photonic Europe 2012. ISBN 978-0-8194-9122-0. ISSN 0277-786X.
[Conference on Optical Micro- and Nanometrology IV. Brussels (BE), 16.04.2012-18.04.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276; GA TA ČR TA02010711; GA ČR GPP102/11/P820
Institutional support: RVO:68081731
Keywords : nanometrology * interferometry * laser noise
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0215729
Hrabina, Jan - Lazar, Josef - Číp, Ondřej
Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations.
Optical Micro- and Nanometrology IV, (Proceedings of SPIE ). Vol. 8430. Bellingham: SPIE, 2012, 84301D:1-9. Photonic Europe 2012. ISBN 978-0-8194-9122-0. ISSN 0277-786X.
[Conference on Optical Micro- and Nanometrology IV. Brussels (BE), 16.04.2012-18.04.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276; GA TA ČR TA02010711; GA ČR GPP102/11/P820
Institutional support: RVO:68081731
Keywords : nanometrology * interferometry * laser noise
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0215729