0333649 - FZÚ 2010 RIV JP eng J - Journal Article
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Kment, Štěpán - Jastrabík, Lubomír - Tichý, M.
A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet.
[Studium iontového toku během depozice tenkých vrstev titanu pomocí plazmové trysky s efektem duté katody.]
Journal of Plasma and Fusion Research SERIES. Roč. 8, - (2009), 719-723. ISSN 1883-9630.
[Proceedings of the 14th International Congress on Plasma Physics (ICPP2008). Fukuoka, 08.09.2008-12.09.2008]
R&D Projects: GA AV ČR KJB100100707; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : ion flux * plasma jet * hollow cathode * plasma diagnostics
Subject RIV: BL - Plasma and Gas Discharge Physics
http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0719.pdf
Permanent Link: http://hdl.handle.net/11104/0178588
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Kment, Štěpán - Jastrabík, Lubomír - Tichý, M.
A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet.
[Studium iontového toku během depozice tenkých vrstev titanu pomocí plazmové trysky s efektem duté katody.]
Journal of Plasma and Fusion Research SERIES. Roč. 8, - (2009), 719-723. ISSN 1883-9630.
[Proceedings of the 14th International Congress on Plasma Physics (ICPP2008). Fukuoka, 08.09.2008-12.09.2008]
R&D Projects: GA AV ČR KJB100100707; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : ion flux * plasma jet * hollow cathode * plasma diagnostics
Subject RIV: BL - Plasma and Gas Discharge Physics
http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0719.pdf
Permanent Link: http://hdl.handle.net/11104/0178588