0308119 - FZÚ 2008 RIV US eng C - Conference Paper (international conference)
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Adámek, Petr - Kment, Štěpán - Tichý, M. - Jastrabík, Lubomír
Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet.
[Měření iontového toku na depoziční substrát u plazmové trysky s efektem duté katody.]
Plasma 2007. Melville, New York: American Instritute of Physics, 2008 - (Hartfuss, H.; Dudeck, M.; Muslelok, J.; Sadowski, M.), s. 427-430. AIP Conference Proceedings, 993. ISBN 978-0-7354-0512-7.
[International Conference on Research and Applications of Plasmas, German-Polish Conference on Plasma Diagnostics for Fusion and Laboratory /4./ and French-Polish Seminar on Thermal Plasma in Space and Laboratory /6./. Greifswald (DE), 16.10.2007-19.10.2007]
R&D Projects: GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522
Keywords : hollow cathode * plasma jet * ion flux * deposition of thin films
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0160694
Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Adámek, Petr - Kment, Štěpán - Tichý, M. - Jastrabík, Lubomír
Measuring the ion flux to the deposition substrate in the hollow Cathode plasma jet.
[Měření iontového toku na depoziční substrát u plazmové trysky s efektem duté katody.]
Plasma 2007. Melville, New York: American Instritute of Physics, 2008 - (Hartfuss, H.; Dudeck, M.; Muslelok, J.; Sadowski, M.), s. 427-430. AIP Conference Proceedings, 993. ISBN 978-0-7354-0512-7.
[International Conference on Research and Applications of Plasmas, German-Polish Conference on Plasma Diagnostics for Fusion and Laboratory /4./ and French-Polish Seminar on Thermal Plasma in Space and Laboratory /6./. Greifswald (DE), 16.10.2007-19.10.2007]
R&D Projects: GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/06/0776
Institutional research plan: CEZ:AV0Z10100522
Keywords : hollow cathode * plasma jet * ion flux * deposition of thin films
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0160694