0560455 - ÚFP 2023 RIV PL eng J - Journal Article
Kanclíř, Vít - Václavík, Jan - Žídek, Karel
Precision of silicon oxynitride refractive-index profile retrieval using optical characterization.
Acta Physica Polonica A. Roč. 143, č. 3 (2021), s. 215-221. ISSN 0587-4246. E-ISSN 1898-794X
R&D Projects: GA MŠMT(CZ) EF16_026/0008390
Grant - others:GA AV ČR(CZ) StrategieAV21/17
Program: StrategieAV
Institutional support: RVO:61389021
Keywords : Dual ion beam sputtering * Gradient refractive-index layers * Precision of optical characterization * Silicon oxynitride
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 0.725, year: 2021 ; AIS: 0.111, rok: 2021
Method of publishing: Open access
Result website:
http://przyrbwn.icm.edu.pl/APP/PDF/140/app140z3p04.pdf

DOI: https://doi.org/10.12693/APhysPolA.140.215
Permanent Link: https://hdl.handle.net/11104/0333383