0484974 - ÚFP 2018 RIV CZ eng C - Conference Paper (international conference)
Koláček, Karel - Schmidt, Jiří - Frolov, Oleksandr - Štraus, Jaroslav - Chalupský, Jaromír - Choukourov, A.
Deformation of thin self-standing mask at inhomogeneous irradiation.
Proceedings of the 3rd International Workshop on Frontiers of X&XUV Optics and its Applications, 3rd IW FX & XUVOA. Prague: Institute of Plasma Physics Czech Academy of Sciences, 2017 - (Koláček, K.; Sobota, J.), č. článku O-09. ISBN 978-80-870026-09-0.
[International Workshop on Frontiers of X&XUV Optics and its Applications 2017, 3rd IW FX & XUVOA /3./. Prague (CZ), 04.10.2017-06.10.2017]
R&D Projects: GA MŠMT LG15013
Institutional support: RVO:61389021 ; RVO:68378271
Keywords : interaction of XUV radiation with solid surface * nanostructuring * nanopatterning * XUV diffraction
OECD category: Optics (including laser optics and quantum optics); Optics (including laser optics and quantum optics) (FZU-D)
Permanent Link: http://hdl.handle.net/11104/0280109
Koláček, Karel - Schmidt, Jiří - Frolov, Oleksandr - Štraus, Jaroslav - Chalupský, Jaromír - Choukourov, A.
Deformation of thin self-standing mask at inhomogeneous irradiation.
Proceedings of the 3rd International Workshop on Frontiers of X&XUV Optics and its Applications, 3rd IW FX & XUVOA. Prague: Institute of Plasma Physics Czech Academy of Sciences, 2017 - (Koláček, K.; Sobota, J.), č. článku O-09. ISBN 978-80-870026-09-0.
[International Workshop on Frontiers of X&XUV Optics and its Applications 2017, 3rd IW FX & XUVOA /3./. Prague (CZ), 04.10.2017-06.10.2017]
R&D Projects: GA MŠMT LG15013
Institutional support: RVO:61389021 ; RVO:68378271
Keywords : interaction of XUV radiation with solid surface * nanostructuring * nanopatterning * XUV diffraction
OECD category: Optics (including laser optics and quantum optics); Optics (including laser optics and quantum optics) (FZU-D)
Permanent Link: http://hdl.handle.net/11104/0280109