0568097 - FZÚ 2023 RIV US eng C - Conference Paper (international conference)
Hauschwitz, Petr
High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm²/min.
Laser-based Micro- and Nanoprocessing XVI. Vol. 11989. Bellingham: SPIE, 2022 - (Watanabe, A.; Kling, R.), č. článku 119890O. ISBN 978-1-5106-4850-0. ISSN 0277-786X. E-ISSN 1996-756X.
[SPIE LASE. San Francisco (US), 22.01.2022-28.02.2022]
R&D Projects: GA MŠMT EF15_006/0000674
EU Projects: European Commission(XE) 739573 - HiLASE CoE
Grant - others:OP VVV - HiLASE-CoE(XE) CZ.02.1.01/0.0/0.0/15_006/0000674
Institutional support: RVO:68378271
Keywords : high-speed multi-beam * nanostructuring techniques
OECD category: Optics (including laser optics and quantum optics)
Result website:
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11989/2607607/High-speed-multi-beam-nanostructuring-techniques-at-HiLASE-with-up/10.1117/12.2607607.shortDOI: https://doi.org/10.1117/12.2607607
Permanent Link: https://hdl.handle.net/11104/0339451