0097914 - FZÚ 2012 RIV CH eng J - Journal Article
Straňák, V. - Hubička, Zdeněk - Adámek, P. - Blažek, J. - Tichý, M. - Špatenka, P. - Hippler, R. - Wrehde, S.
Time-resolved probe diagnostics of pulsed dc magnetron discharge during deposition of TiOx layers.
[Časově rozlišená sondová diagnostika pulzního dc magnetronu za depozice TiOx vrstev.]
Surface and Coatings Technology. Roč. 21, - (2006), s. 2512-2519. ISSN 0257-8972
R&D Projects: GA ČR GA202/05/2242
Grant - others:Deutsche Forschungsgemeinschaft(DE) SFB/TR 24
Institutional research plan: CEZ:AV0Z10100522
Keywords : magnetron discharge * pulsed magnetron * time and spatially-resolved probe diagnostics
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.559, year: 2006
Permanent Link: http://hdl.handle.net/11104/0156948
Straňák, V. - Hubička, Zdeněk - Adámek, P. - Blažek, J. - Tichý, M. - Špatenka, P. - Hippler, R. - Wrehde, S.
Time-resolved probe diagnostics of pulsed dc magnetron discharge during deposition of TiOx layers.
[Časově rozlišená sondová diagnostika pulzního dc magnetronu za depozice TiOx vrstev.]
Surface and Coatings Technology. Roč. 21, - (2006), s. 2512-2519. ISSN 0257-8972
R&D Projects: GA ČR GA202/05/2242
Grant - others:Deutsche Forschungsgemeinschaft(DE) SFB/TR 24
Institutional research plan: CEZ:AV0Z10100522
Keywords : magnetron discharge * pulsed magnetron * time and spatially-resolved probe diagnostics
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.559, year: 2006
Permanent Link: http://hdl.handle.net/11104/0156948