0486979 - FZÚ 2018 RIV US eng J - Journal Article
Hippler, R. - Hubička, Zdeněk - Čada, Martin - Kšírová, Petra - Wulff, H. - Helm, C.A. - Straňák, V.
Angular dependence of plasma parameters and film properties during high power impulse magnetron sputtering for deposition of Ti and TiO2 layers.
Journal of Applied Physics. Roč. 121, č. 17 (2017), s. 1-9, č. článku 171906. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA ČR(CZ) GA15-00863S
Institutional support: RVO:68378271
Keywords : HiPIMS * Langmuir probe * titanium dioxide * angular dependence * XRD * SEM
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.176, year: 2017
Permanent Link: http://hdl.handle.net/11104/0281685
Hippler, R. - Hubička, Zdeněk - Čada, Martin - Kšírová, Petra - Wulff, H. - Helm, C.A. - Straňák, V.
Angular dependence of plasma parameters and film properties during high power impulse magnetron sputtering for deposition of Ti and TiO2 layers.
Journal of Applied Physics. Roč. 121, č. 17 (2017), s. 1-9, č. článku 171906. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA ČR(CZ) GA15-00863S
Institutional support: RVO:68378271
Keywords : HiPIMS * Langmuir probe * titanium dioxide * angular dependence * XRD * SEM
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.176, year: 2017
Permanent Link: http://hdl.handle.net/11104/0281685