Skip to main content
SpringerLink
Log in

Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas

  • Published:
Thermophysics and Aeromechanics Aims and scope

Abstract

The nanosecond laser ablation technique was used to synthesize thin silicon oxide films of various stoichiometry in vacuum and in a background gas. The local oxidation degree of specimens was evaluated using three different characterization methods. It was found that, on increasing the distance to the laser-plume axis, there occurred a monotonic increase in the oxygen content of the films due to their oxidation inhomogeneity. A profound decrease in ablated mass, related to an increased reverse flow of substance to the target, was found to occur when the pressure of the ambient mixture was increased from 20 to 60 Pa. A comparison was made of the oxidation efficiencies of the films heated at the stage of their synthesis and at the stage of annealing of already formed films. It is shown that the composition of the films could be controlled by varying the inert-gas pressure at the constant pressure of the chemically active component in ambient mixture.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Bäuerle, Laser Processing and Chemistry, Berlin Heidelberg, Springer-Verlag, 2011.

    Book  Google Scholar 

  2. J.C. Alonso, R. Diamant, P. Castillo, M.C. Acosta-García, N. Batina, and E. Haro-Poniatowski, Thin films of silver nanoparticles deposited in vacuum by pulsed laser ablation using a YAG:Nd laser, Appl. Surf. Sci., 2009, Vol. 255, No. 9, P. 4933–4937.

    Article  ADS  Google Scholar 

  3. I. Mirza, G.O. Connell, J.J. Wang, and J.G. Lunney, Comparison of nanosecond and femtosecond pulsed laser deposition of silver nanoparticle films, Nanotechnology, 2014, Vol. 25, P. 265301-1–265301-10.

    Article  ADS  Google Scholar 

  4. S.V. Starinskiy, Yu.G. Shukhov, and A.V. Bulgakov, Dynamics of pulsed laser ablation of gold in vacuum in the regime of nanostructured film synthesis, Tech. Phys. Lett., 2016, Vol. 42, No. 4, P. 411–414.

    Article  ADS  Google Scholar 

  5. V.P. Zhukov and N.M. Bulgakova, Role of ambient gas in heating of metal samples by femtosecond pulses of laser radiation, Thermophysics and Aeromechanics, 2009, Vol. 16, No. 2, P. 165–176.

    Article  ADS  Google Scholar 

  6. N.Yu. Bykov and G.A. Lukianov, Direct Monte Carlo simulation of pulsed laser ablation of metals with clasterization processes in vapor, Thermophysics and Aeromechanics, 2006, Vol. 13, No. 4, P. 523–535.

    Article  ADS  Google Scholar 

  7. T.E. Itina, W. Marine, and M. Autric, Monte Carlo simulation of pulsed laser ablation from two-component target into diluted ambient gas, J. Appl. Phys., 1997, Vol. 82, No. 7, P. 3536–3542.

    Article  ADS  Google Scholar 

  8. F. Garrelie, J. Aubreton, and A. Catherinot, Monte-Carlo simulation of the laser-induced plasma plume expansion under vacuum: comparison with experiments, J. Appl. Phys., 1998, Vol. 83, No. 10, P. 5075–5082.

    Article  ADS  Google Scholar 

  9. A.V. Bulgakov, M.R. Predtechensky, and A.P. Mayorov, Transport of neutral atoms, monoxides and clusters in the plume produced by laser ablation of YBa2Cu3O7−x in oxygen environment, Appl. Surf. Sci., 1996, Vol. 96–98, P. 159–163.

    Article  ADS  Google Scholar 

  10. A.V. Bulgakov and N.M. Bulgakova, Dynamics of laser-induced plume expansion into an ambient gas during film deposition, J. Phys. D. Appl. Phys., 1995, Vol. 28, No. 8, P. 1710–1718.

    Article  ADS  Google Scholar 

  11. E. Fazio, F. Neri, P.M. Ossi, N. Santo, and S. Trusso, Growth process of nanostructured silver films pulsed laser ablated in high-pressure inert gas, Appl. Surf. Sci., 2009, Vol. 255, No. 24, P. 9676–9679.

    Article  ADS  Google Scholar 

  12. S. Wang, V. Smirnov, T. Chen, B. Holländer, X. Zhang, S. Xiong, Y. Zhao, and F. Finger, Effects of oxygen incorporation in solar cells with a-SIOx: H absorber layer, Jpn. J. Appl. Phys., 2015, Vol. 54, No. 1, P. 011401-1–011401-6.

    Article  ADS  Google Scholar 

  13. E. Fazio, E. Barletta, F. Barreca, F. Neri, and S. Trusso, Investigation of a nanocrystalline silicon phase embedded in SiOx thin films grown by pulsed laser deposition, J. Vac. Sci. Technol. B, Microelectron. Nanom. Struct., 2005, Vol. 23, No. 2, P. 519–524.

    Article  ADS  Google Scholar 

  14. S. Trusso, E. Barletta, F. Barreca, E. Fazio, and F. Neri, Time resolved imaging studies of the plasma produced by laser ablation of silicon in O2/Ar atmosphere, Laser Part. Beams, 2005, Vol. 23, No. 2, P. 149–153.

    Article  ADS  Google Scholar 

  15. M. Inada, H. Nakagawa, A. Sugimura et al. Effects of hydrogen on Si nanoparticles formed by pulsed laser ablation, Appl. Surf. Sci., 2002, Vol. 197–198, P. 666–669.

    Article  ADS  Google Scholar 

  16. M. Jadraque, A.B. Evtushenko, D. Ávila-Brande, M. López-Arias, V. Loriot, Y.G. Shukhov, L.S. Kibis, A.V. Bulgakov, and M. Martín, Co-doped ZnS clusters and nanostructures produced by pulsed laser ablation, J. Phys. Chem. C, 2013, Vol. 117, No. 10, P. 5416–5423.

    Article  Google Scholar 

  17. A.B. Brailovsky, S.V. Gaponov, and V.I. Luchin, Mechanisms of melt droplets and solid-particle ejection from a target surface by pulsed laser action, Appl. Phys. A, Mater. Sci. Process., 1995, Vol. 61, No. 1, P. 81–86.

    Article  ADS  Google Scholar 

  18. J.H. Yoo, S.H. Jeong, R. Creif, and R.E. Russo, Explosive change in crater properties during high power nanosecond laser ablation of silicon, J. Appl. Phys., 2000, Vol. 88, No. 3, P. 1638–1649.

    Article  ADS  Google Scholar 

  19. Q. Lu, S.S. Mao, X. Mao, and R.E. Russo, Delayed phase explosion during high-power nanosecond laser ablation of silicon, Appl. Phys. Lett., 2002, Vol. 80, No. 17, P. 3072–3074.

    Article  ADS  Google Scholar 

  20. D. Ristić, M. Ivanda, G. Speranza, Z. Siketić, I. Bogdanović-Radović, M. Marciuš, M. Ristić, O. Gamulin, S. Musić, K. Furić, G.C. Righini, and M. Ferrari, Local site distribution of oxygen in silicon-rich oxide thin films: a tool to investigate phase separation, J. Phys. Chem., 2012, Vol. C, No. 116, P. 10039–10047.

    Google Scholar 

  21. S. George, R.K. Singh, V.R.M. Nampoori, A. Kumar, Fast imaging of the laser-blow-off plume driven shock wave: Dependence on the mass and density of the ambient gas, Phys. Lett. Sect. A, Gen. At. Solid State Phys., 2013, Vol. 377, No. 5, P. 391–398.

    Google Scholar 

  22. S.S. Harilal, C.V. Bindhu, M.S. Tillack, F. Najmabadi, and A.C. Gaeris, Internal structure and expansion dynamics of laser ablation plumes into ambient gases, J. Appl. Phys., 2003, Vol. 93, No. 5, P. 2380.

    Article  ADS  Google Scholar 

  23. L. Égerházi, Z. Geretovszky, and T. Szörényi, Thickness distribution of carbon nitride films grown by inverse-pulsed laser deposition, Appl. Surf. Sci., 2005, Vol. 247, Nos. 1–4, P. 182–187.

    Article  ADS  Google Scholar 

  24. A.A. Morozov, Z. Geretovszky, and T. Szörényi, Test particle Monte-Carlo study of backward deposition during evaporation into a background gas, J. Phys. D., Appl. Phys., 2008, Vol. 41, No. 1, P. 1–6.

    Article  Google Scholar 

  25. E.D. van Hattum, A. Palmero, and W.M. Arnoldbik, Distinct processes in radio-frequency reactive magnetron plasma sputter deposition of silicon suboxide films, J. Appl. Phys., 2007, Vol. 102, No. 12, P. 124505-1–124505-11.

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Kutateladze Institute of Thermophysics SB RAS, Novosibirsk, Russia

    A. A. Rodionov, S. V. Starinskiy, Yu. G. Shukhov & A. V. Bulgakov

  2. Novosibirsk State University, Novosibirsk, Russia

    A. A. Rodionov & S. V. Starinskiy

  3. HiLASE Centre, Institute of Physics CAS, Prague, Czechia

    A. V. Bulgakov

Authors
  1. A. A. Rodionov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. V. Starinskiy
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yu. G. Shukhov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. V. Bulgakov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. V. Starinskiy.

Additional information

This work was supported by President of the Russian Federation (Grant No. MK-2404.2019.8; deposition of silicon films), by Government of the Russian Federation, State Registration No. 121031800214-7 (weighing measurements), and by the Russian Foundation for Basic Research (Grant No. 19-08-01014; analysis of deposited films).

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Rodionov, A.A., Starinskiy, S.V., Shukhov, Y.G. et al. Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas. Thermophys. Aeromech. 28, 549–554 (2021). https://doi.org/10.1134/S0869864321040089

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0869864321040089

Keywords

Search

Navigation