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RIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films

  1. 1.
    SYSNO0424399
    TitleRIR MAPLE Procedure for Deposition of Carbon Rich Si/C/H Films
    Author(s) Dřínek, Vladislav (UCHP-M) RID, ORCID, SAI
    Strašák, Tomáš (UCHP-M) RID, ORCID, SAI
    Novotný, F. (CZ)
    Fajgar, Radek (UCHP-M) RID, ORCID, SAI
    Bastl, Zdeněk (UFCH-W) RID, ORCID
    Source Title Applied Surface Science. Roč. 292, FEB 15 (2014), s. 413-419. - : Elsevier
    Document TypeČlánek v odborném periodiku
    Grant GA13-25747S GA ČR - Czech Science Foundation (CSF)
    RVO6840770, CZ - Czech Republic
    Institutional supportUCHP-M - RVO:67985858 ; UFCH-W - RVO:61388955
    Languageeng
    CountryNL
    Keywords MAPLE * dendrimer * SiC * DLC * cross-kinking
    Cooperating institutions Vysoká škola chemicko-technologická v Praze (Czech Republic)
    Permanent Linkhttp://hdl.handle.net/11104/0230464
    FileDownloadSizeCommentaryVersionAccess
    0424399.pdf36.4 MBAuthor’s postprintopen-access
     
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