One-step 3D microstructuring of PMMA using MeV light ions

Number of the records: 1

1.

SYSNO	0565861
Title	One-step 3D microstructuring of PMMA using MeV light ions
Author(s)	Romanenko, Oleksandr V. (UJF-V) [ONF]_{ORCID, SAI} Jagerová, Adéla (UJF-V) [ONF]_{ORCID, SAI} Borodkin, Andrei (URE-Y) Havránek, Vladimír (UJF-V) [ONF]_{RID, SAI, ORCID} Macková, Anna (UJF-V) [ONF]_{RID, ORCID, SAI}
Source Title	EPJ Web of Conferences, 261. - Les ulis : EDP sciences, 2022
Conference	Applied Nuclear Physics Conference (ANPC 2021), 12.09.2021 - 17.09.2021, Prague
Article number	02001
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	GA19-02482S GA ČR - Czech Science Foundation (CSF)
Institutional support	UJF-V - RVO:61389005 ; URE-Y - RVO:67985882
Language	eng
Country	FR
Keywords	PMA * 3D microstructures * ion beam lithography
URL	https://doi.org/10.1051/epjconf/202226102001
Permanent Link	https://hdl.handle.net/11104/0337353

	File	Download	Size	Commentary	Version	Access
	0565861 .pdf	0	1.8 MB	Open Access - CC licence	Publisher’s postprint	open-access

Number of the records: 1