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Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO.sub.2./sub./TiO.sub.2./sub./IrO.sub.2./sub. capacitors

  1. 1.
    SYSNO0561797
    TitleTemperature and ambient atmosphere dependent electrical characterization of sputtered IrO2/TiO2/IrO2 capacitors
    Author(s) Maier, F.J. (AT)
    Schneider, M. (AT)
    Artemenko, Anna (FZU-D) RID, ORCID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Stoeger-Pollach, M. (AT)
    Schmid, U. (AT)
    Source Title Journal of Applied Physics. Roč. 131, č. 9 (2022). - : AIP Publishing
    Article number095301
    Document TypeČlánek v odborném periodiku
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountryUS
    Keywords IrO2/TiO2/IrO2 capacitors * dielectric properties * temperature dependence
    URLhttps://hdl.handle.net/11104/0334300
    Permanent Linkhttps://hdl.handle.net/11104/0334300
    FileDownloadSizeCommentaryVersionAccess
    0561797.pdf13.6 MBCC LicencePublisher’s postprintopen-access
     
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