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Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices.
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SYSNO 0550970 Title Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices. Author(s) Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Kšírová, Petra (FZU-D) RID, ORCID
Klinger, Miloslav (FZU-D) ORCIDIssue data 2021 Name of the owner Fyzikální ústav AV ČR, v. v. i Date of the patent acceptance 10.03.2021 Patent no. or utility model no. or industrial design no. EP3788181A1 Patent category A - EPO (Evropský patentový úřad) Code of the issuer name NL001 - Netherlands Patent Office Rijswijk Document Type Patentový dokument Grant CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic Institutional support FZU-D - RVO:68378271 Language eng Keywords thin films * hollow cathode discharge * deposition * RF plasma * pulsed plasma * hollow tube URL https://worldwide.espacenet.com/patent/search/family/063713983/publication/EP3788181A1?q=EP3788181A1 Permanent Link http://hdl.handle.net/11104/0326291
Number of the records: 1