Number of the records: 1

SMV-2021-31: TELIGHT zaměřovací obrazec

SYSNO	0549960
Title	SMV-2021-31: TELIGHT zaměřovací obrazec
Title	SMV-2021-31: TELIGHT aiming pattern
Author(s)	Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Chlumská, Jana (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI}
Issue data	Brno: TELIGHT Brno, s.r.o., 2021
Document Type	Výzkumná zpráva
Grant	Non-public resources
Language	cze
Country	CZ
Keywords	e-beam lithography * optics * reactive ion etching
Permanent Link	http://hdl.handle.net/11104/0325852

Number of the records: 1