Number of the records: 1  

Beam shaping and probe characterization in the scanning electron microscope

  1. 1.
    SYSNO0543063
    TitleBeam shaping and probe characterization in the scanning electron microscope
    Author(s) Řiháček, Tomáš (UPT-D) RID, ORCID
    Horák, M. (CZ)
    Schachinger, T. (AT)
    Mika, Filip (UPT-D) RID, SAI, ORCID
    Matějka, Milan (UPT-D) RID, ORCID, SAI
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Fořt, Tomáš (UPT-D) RID, ORCID, SAI
    Radlička, Tomáš (UPT-D) RID, ORCID, SAI
    Johnson, C. W. (US)
    Novák, L. (CZ)
    Seďa, B. (CZ)
    McMorran, B.J. (US)
    Müllerová, Ilona (UPT-D) RID, SAI, ORCID
    Corespondence/seniorŘiháček, Tomáš - Korespondující autor
    Source Title Ultramicroscopy. Roč. 225, June (2021). - : Elsevier
    Article number113268
    Document TypeČlánek v odborném periodiku
    Grant TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryNL
    Keywords Electron diffraction * SEM * Electron beam structuring * Spot shape measurement * Electron vortex beam
    Cooperating institutions Central European Institute of Technology (Czech Republic)
    Technische Universität Wien (Austria)
    Thermo Fisher Scientific (Czech Republic)
    University of Oregon (United States)
    URLhttps://www.sciencedirect.com/science/article/pii/S0304399121000589
    Permanent Linkhttp://hdl.handle.net/11104/0320365
     
Number of the records: 1  

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