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Beam shaping and probe characterization in the scanning electron microscope
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SYSNO 0543063 Title Beam shaping and probe characterization in the scanning electron microscope Author(s) Řiháček, Tomáš (UPT-D) RID, ORCID
Horák, M. (CZ)
Schachinger, T. (AT)
Mika, Filip (UPT-D) RID, SAI, ORCID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Radlička, Tomáš (UPT-D) RID, ORCID, SAI
Johnson, C. W. (US)
Novák, L. (CZ)
Seďa, B. (CZ)
McMorran, B.J. (US)
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCorespondence/senior Řiháček, Tomáš - Korespondující autor Source Title Ultramicroscopy. Roč. 225, June (2021). - : Elsevier Article number 113268 Document Type Článek v odborném periodiku Grant TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic Institutional support UPT-D - RVO:68081731 Language eng Country NL Keywords Electron diffraction * SEM * Electron beam structuring * Spot shape measurement * Electron vortex beam Cooperating institutions Central European Institute of Technology (Czech Republic)
Technische Universität Wien (Austria)
Thermo Fisher Scientific (Czech Republic)
University of Oregon (United States)URL https://www.sciencedirect.com/science/article/pii/S0304399121000589 Permanent Link http://hdl.handle.net/11104/0320365
Number of the records: 1