Deposition of cobalt oxide films by reactive pulsed magnetron sputtering

Number of the records: 1

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SYSNO	0541687
Title	Deposition of cobalt oxide films by reactive pulsed magnetron sputtering
Author(s)	Hippler, Rainer (FZU-D)_ORCID Čada, Martin (FZU-D)_{RID, ORCID, SAI} Kšírová, Petra (FZU-D)_{RID, ORCID} Olejníček, Jiří (FZU-D)_{RID, ORCID} Jiříček, Petr (FZU-D)_{RID, ORCID, SAI} Houdková, Jana (FZU-D)_{RID, ORCID} Wulff, H. (DE) Kruth, A. (DE) Helm, C.A. (DE) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Corespondence/senior	Hippler, Rainer - Korespondující autor
Source Title	Surface and Coatings Technology. Roč. 405, Jan (2021). - : Elsevier
Article number	126590
Document Type	Článek v odborném periodiku
Grant	CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	FV20580 GA MPO - Ministry of Industry and Trade (MPO)
	GA19-00579S GA ČR - Czech Science Foundation (CSF)
	StrategieAV21/6, CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	CH
Keywords	cobalt oxide film * pulsed magnetron sputtering * HiPIMS * Raman spectroscopy * XPS * XRD * electrical resistivity
URL	https://doi.org/10.1016/j.surfcoat.2020.126590
Permanent Link	http://hdl.handle.net/11104/0319218

Number of the records: 1