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Synthesis of Cu-Ti thin film multilayers on silicon substrates

  1. 1.
    SYSNO0541428
    TitleSynthesis of Cu-Ti thin film multilayers on silicon substrates
    Author(s) Torrisi, Alfio (UJF-V) [ONF] RID, ORCID
    Horák, Pavel (UJF-V) [ONF] RID, ORCID
    Vacík, Jiří (UJF-V) [ONF] RID, ORCID, SAI
    Lavrentiev, Vasyl (UJF-V) [ONF] RID, ORCID, SAI
    Cannavó, Antonino (UJF-V) [ONF] ORCID, SAI
    Ceccio, Giovanni (UJF-V) [ONF] ORCID, RID, SAI
    Vaniš, Jan (URE-Y) RID
    Yatskiv, Roman (URE-Y) RID, ORCID
    Grym, Jan (URE-Y)
    Corespondence/seniorTorrisi, Alfio - Korespondující autor
    Source Title Bulletin of Materials Science. Roč. 44, č. 1 (2021). - : Indian Academy of Sciences
    Article number50
    Document TypeČlánek v odborném periodiku
    Grant GA19-02804S GA ČR - Czech Science Foundation (CSF)
    Institutional supportURE-Y - RVO:67985882 ; UJF-V - RVO:61389005
    Languageeng
    CountryIN
    Keywords chemiresistors * intermixing layers * thermal annealing * SIMS analysis * Cu-Ti
    URLhttps://doi.org/10.1007/s12034-020-02346-6
    Permanent Linkhttp://hdl.handle.net/11104/0318986
     
Number of the records: 1  

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