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Possibilities of laser recrystallization and laser ablation in thin-layer structures based on a-Si:H

  1. 1.
    SYSNO0540759
    TitlePossibilities of laser recrystallization and laser ablation in thin-layer structures based on a-Si:H
    Author(s) Stuchlík, Jiří (FZU-D) RID, ORCID
    Stuchlíková, The-Ha (FZU-D) RID, ORCID
    Fajgar, Radek (UCHP-M) RID, ORCID, SAI
    Kupčík, Jaroslav (FZU-D) ORCID
    Remeš, Zdeněk (FZU-D) RID, ORCID
    Source TitleOnline, 2020
    Conference 4th BIATRI Workshop, 09.12.2020 - 10.12.2020, Online
    Document TypeAbstrakt
    Grant LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    GC19-02858J GA ČR - Czech Science Foundation (CSF)
    CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
    EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    Institutional supportFZU-D - RVO:68378271 ; UCHP-M - RVO:67985858
    Languageeng
    CountryCZ
    Keywords CVD * thin films * a-Si:H * nanoparticles
    Permanent Linkhttp://hdl.handle.net/11104/0318371
     
Number of the records: 1  

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