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Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation

  1. 1.
    SYSNO0540252
    TitleTwo-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation
    Author(s) Milov, I. (NL)
    Zhakhovsky, V. (RU)
    Ilnitsky, D. (RU)
    Migdal, K. (RU)
    Khokhlov, V. (RU)
    Petrov, Y. (RU)
    Inogamov, N. (RU)
    Lipp, V. (DE)
    Medvedev, Nikita (UFP-V) [LP] ORCID
    Ziaja, B. (DE)
    Medvedev, V. (RU)
    Makhotkin, I.A. (NL)
    Louis, E. (NL)
    Bijkerk, F. (NL)
    Source Title Applied Surface Science. Roč. 528, October (2020), s. 1-18. - : Elsevier
    Article number146952
    Document TypeČlánek v odborném periodiku
    Grant 654148, XE - EU countries
    LTT17015 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    LM2015083 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    Institutional supportUFP-V - RVO:61389021
    Languageeng
    CountryNL
    Keywords Extreme ultraviolet * Femtosecond laser ablation * Free-electron laser * Molecular dynamics * Monte Carlo * Thin films
    Cooperating institutions MESA Institute for Nanotechnology (Netherlands)
    Dukhov Research Institute of Automatics (VNIIA) (Russian Federation)
    Landau Institute for Theoretical Physics, Russian Academy of Sciences (Russian Federation)
    Deutsches Elektronen-Synchrotron (DESY) (Germany)
    Institute of Spectroscopy, Russian Academy of Sciences (Russian Federation)
    URLhttps://www.sciencedirect.com/science/article/pii/S0169433220317098?via%3Dihub
    Permanent Linkhttp://hdl.handle.net/11104/0317887
     
Number of the records: 1  

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