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Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography
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SYSNO 0536751 Title Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography Author(s) Šarbort, Martin (UPT-D) RID, ORCID, SAI
Holá, Miroslava (UPT-D) RID, ORCID, SAI
Pavelka, Jan (UPT-D) RID, SAI
Řeřucha, Šimon (UPT-D) RID, ORCID, SAI
Oulehla, Jindřich (UPT-D) RID, ORCID, SAI
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAISource Title Imaging and Applied Optics Congress. Proceedings, Computational Optical Sensing and Imaging. - Washington : OSA, 2020 Conference Imaging and Applied Optics Congress, 22.06.2020 - 26.06.2020, Washington Document Type Konferenční příspěvek (zahraniční konf.) Grant TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic EF16_026/0008460 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic Institutional support UPT-D - RVO:68081731 Language eng Country US Keywords focus sensor * optical metrology * rough topography URL https://www.osapublishing.org/abstract.cfm?URI=DH-2020-HTh5H.2 Permanent Link http://hdl.handle.net/11104/0314472
Number of the records: 1