Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

Number of the records: 1

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SYSNO	0533159
Title	Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor
Author(s)	Vokoun, David (FZU-D)_{RID, ORCID} Kadeřávek, Lukáš (FZU-D)_ORCID Balogová, Jarmila (FZU-D)_ORCID Fekete, Ladislav (FZU-D)_{RID, ORCID} Landa, Michal (UT-L)_RID Drahokoupil, Jan (FZU-D)_{RID, ORCID} Němeček, J. (CZ) Heller, Luděk (FZU-D)_{RID, ORCID}
Corespondence/senior	Vokoun, David - Korespondující autor
Source Title	Smart Materials and Structures. Roč. 29, č. 1 (2020), s. 1-10. - : Institute of Physics Publishing
Article number	015001
Document Type	Článek v odborném periodiku
Grant	GA17-05360S GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
	GA18-03834S GA ČR - Czech Science Foundation (CSF)
	GA17-05360S GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
	CZ.2.16/3.1.00/21568, XE - EU countries
	LO1409 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	LM2015088 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271 ; UT-L - RVO:61388998
Language	eng
Country	GB
Keywords	NiTi film * Xe FIB * MEMS * AFM * resonant ultrasound spectroscopy * sensor fabrication
URL	https://doi.org/10.1088/1361-665X/ab4e0c
Permanent Link	http://hdl.handle.net/11104/0311637

Number of the records: 1