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The influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography

  1. 1.
    SYSNO0525371
    TitleThe influence of Au-nanoparticles presence in PDMS on microstructures creation by ion beam lithography
    Author(s) Romanenko, Oleksandr V. (UJF-V) [ONF] ORCID, SAI
    Slepička, P. (CZ)
    Malinský, Petr (UJF-V) [ONF] RID, ORCID, SAI
    Cutroneo, Mariapompea (UJF-V) [ONF] ORCID, RID, SAI
    Havránek, Vladimír (UJF-V) [ONF] RID, SAI, ORCID
    Stammers, James H. (UJF-V) [ONF]
    Švorčík, V. (CZ)
    Macková, Anna (UJF-V) [ONF] RID, ORCID, SAI
    Corespondence/seniorRomanenko, Oleksandr V. - Korespondující autor
    Source Title Surface and Interface Analysis. Roč. 52, č. 12 (2020), s. 1040-1044. - : Wiley
    Document TypeČlánek v odborném periodiku
    Grant GA19-02482S GA ČR - Czech Science Foundation (CSF)
    LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    Institutional supportUJF-V - RVO:61389005
    Languageeng
    CountryUS
    Keywords gold nanoparticles * ion beam lithography * microstructure * PDMS * shrinkage
    Cooperating institutions Vysoká škola chemicko-technologická v Praze (Czech Republic)
    Univerzita Jana Evangelisty Purkyně v Ústí nad Labem (Czech Republic)
    URLhttps://doi.org/10.1002/sia.6821
    Permanent Linkhttp://hdl.handle.net/11104/0312722
     
Number of the records: 1  

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