Functional nano-structuring of thin silicon nitride membranes

Number of the records: 1

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SYSNO	0525191
Title	Functional nano-structuring of thin silicon nitride membranes
Author(s)	Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Řiháček, Tomáš (UPT-D)_{RID, ORCID} Knápek, Alexandr (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI}
Corespondence/senior	Matějka, Milan - Korespondující autor
Source Title	Journal of Electrical Engineering - Elektrotechnický časopis. Roč. 71, č. 2 (2020), s. 127-130. - : Slovenská technická univerzita v Bratislave
Document Type	Článek v odborném periodiku
Grant	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	SK
Keywords	membrane * nano optical device * electron optics * electron beam lithography * silicon nitride * reactive ion etching * silicon etching * microfabrication
URL	https://content.sciendo.com/view/journals/jee/71/2/article-p127.xml
Permanent Link	http://hdl.handle.net/11104/0309382

Number of the records: 1