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Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration

  1. 1.
    SYSNO0525112
    TitleNanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration
    Author(s) Skoupý, Radim (UPT-D) RID, ORCID, SAI
    Fořt, Tomáš (UPT-D) RID, ORCID, SAI
    Krzyžánek, Vladislav (UPT-D) RID, ORCID, SAI
    Source Title Nanomaterials. Roč. 10, č. 2 (2020). - : MDPI
    Article number332
    Document TypeČlánek v odborném periodiku
    Grant GA17-15451S GA ČR - Czech Science Foundation (CSF)
    FV30271 GA MPO - Ministry of Industry and Trade (MPO), CZ - Czech Republic
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryCH
    Keywords SEM * quantitative imaging * back-scattered electrons * standardless calibration * electron mirror * sample bias * Monte Carlo simulation * thin coating layers
    URLhttps://www.mdpi.com/2079-4991/10/2/332
    Permanent Linkhttp://hdl.handle.net/11104/0309322
     
Number of the records: 1  

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