Assessing the thickness error rate of quantitative STEM measurements

Number of the records: 1

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SYSNO	0521571
Title	Assessing the thickness error rate of quantitative STEM measurements
Author(s)	Skoupý, Radim (UPT-D)_{RID, ORCID, SAI} Krzyžánek, Vladislav (UPT-D)_{RID, ORCID, SAI}
Source Title	MCM 2019. 14th Multinational Congress on Microscopy. Proceedings. S. 107-109. - Belgrade : University of Belgrade, 2019
Conference	Multinational Congress on Microscopy /14./, 15.09.2019 - 20.09.2019, Belgrade
Document Type	Abstrakt
Grant	GA17-15451S GA ČR - Czech Science Foundation (CSF)
	FV30271 GA MPO - Ministry of Industry and Trade (MPO), CZ - Czech Republic
	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	RS
Keywords	qSTEM * BSE signal
Permanent Link	http://hdl.handle.net/11104/0306173

Number of the records: 1