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Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target

SYSNO	0518879
Title	Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target
Author(s)	Hippler, Rainer (FZU-D)_ORCID Čada, Martin (FZU-D)_{RID, ORCID, SAI} Straňák, Vítězslav (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Source Title	Plasma Sources Science & Technology. Roč. 28, Nov (2019), s. 1-13. - : Institute of Physics Publishing
Article number	115020
Document Type	Článek v odborném periodiku
Grant	CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	GA19-00579S GA ČR - Czech Science Foundation (CSF)
	FV30177 GA MPO - Ministry of Industry and Trade (MPO)
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	GB
Keywords	magnetron sputtering * HiPIMS * bipolar pulse * time-resolved optical emission spectroscopy * ion mass spectrometry
URL	http://hdl.handle.net/11104/0303898
Permanent Link	http://hdl.handle.net/11104/0303898

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Number of the records: 1