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Fabrication of functional nanostructures in thin silicon nitride membranes
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SYSNO 0512151 Title Fabrication of functional nanostructures in thin silicon nitride membranes Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Řiháček, Tomáš (UPT-D) RID, ORCID
Knápek, Alexandr (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAICorespondence/senior Matějka, Milan - Korespondující autor Source Title Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. - Amman : Jordan University of Science & Technology, 2019 Conference The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4), 02.05.2019 - 04.05.2019, Amman Document Type Abstrakt Institutional support UPT-D - RVO:68081731 Language eng Country JO Keywords thin dielectric layers * silicon nitride * membranes * electron beam lithography Permanent Link http://hdl.handle.net/11104/0302363
Number of the records: 1