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Fabrication of functional nanostructures in thin silicon nitride membranes

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    SYSNO0512151
    TitleFabrication of functional nanostructures in thin silicon nitride membranes
    Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
    Chlumská, Jana (UPT-D) RID, ORCID, SAI
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Řiháček, Tomáš (UPT-D) RID, ORCID
    Knápek, Alexandr (UPT-D) RID, ORCID, SAI
    Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Corespondence/seniorMatějka, Milan - Korespondující autor
    Source Title Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. - Amman : Jordan University of Science & Technology, 2019
    Conference The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4), 02.05.2019 - 04.05.2019, Amman
    Document TypeAbstrakt
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryJO
    Keywords thin dielectric layers * silicon nitride * membranes * electron beam lithography
    Permanent Linkhttp://hdl.handle.net/11104/0302363
     
Number of the records: 1