Number of the records: 1

Fabrication of functional nanostructures in thin silicon nitride membranes

SYSNO	0512151
Title	Fabrication of functional nanostructures in thin silicon nitride membranes
Author(s)	Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Chlumská, Jana (UPT-D)_{RID, ORCID, SAI} Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Řiháček, Tomáš (UPT-D)_{RID, ORCID} Knápek, Alexandr (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI}
Corespondence/senior	Matějka, Milan - Korespondující autor
Source Title	Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. - Amman : Jordan University of Science & Technology, 2019
Conference	The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4), 02.05.2019 - 04.05.2019, Amman
Document Type	Abstrakt
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	JO
Keywords	thin dielectric layers * silicon nitride * membranes * electron beam lithography
Permanent Link	http://hdl.handle.net/11104/0302363

Number of the records: 1