Number of the records: 1

Automated system for optical inspection of defects in resist coated non-patterned wafer.

SYSNO	0512149
Title	Automated system for optical inspection of defects in resist coated non-patterned wafer.
Author(s)	Knápek, Alexandr (UPT-D)_{RID, ORCID, SAI} Drozd, Michal (UPT-D) Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Chlumská, Jana (UPT-D)_{RID, ORCID, SAI} Král, Stanislav (UPT-D)_{RID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI}
Source Title	Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. - Amman : Jordan University of Science & Technology, 2019
Conference	The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4), 02.05.2019 - 04.05.2019, Amman
Document Type	Abstrakt
Grant	FV10618 GA MPO - Ministry of Industry and Trade (MPO)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	JO
Keywords	dielectric surface inspection * resist coated wafer
Permanent Link	http://hdl.handle.net/11104/0302361

Number of the records: 1