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Automated inspection of PMMA coating on non-patterned silicon wafers

    1.
    SYSNO0511777
    TitleAutomated inspection of PMMA coating on non-patterned silicon wafers
    Author(s) Knápek, Alexandr (UPT-D) RID, ORCID, SAI
    Drozd, Michal (UPT-D)
    Matějka, Milan (UPT-D) RID, ORCID, SAI
    Chlumská, Jana (UPT-D) RID, ORCID, SAI
    Král, Stanislav (UPT-D) RID, SAI
    Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Source Title 11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. S. 162. - - : -, 2019
    Conference International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./, 22.09.2019 - 25.09.2019, Ioannina
    Document TypeAbstrakt
    Grant FV10618 GA MPO - Ministry of Industry and Trade (MPO)
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    Keywords dielectric surface inspection * resist coated wafer
    Permanent Linkhttp://hdl.handle.net/11104/0302052
     
Number of the records: 1  

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