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In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

  1. 1.
    SYSNO0508751
    TitleIn-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM
    Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
    Mika, Filip (UPT-D) RID, SAI, ORCID
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Materna Mikmeková, Eliška (UPT-D) ORCID, RID, SAI
    Müllerová, Ilona (UPT-D) RID, SAI, ORCID
    Corespondence/seniorKonvalina, Ivo - Korespondující autor
    Source Title Materials. Roč. 12, č. 14 (2019). - : MDPI
    Article number2307
    Document TypeČlánek v odborném periodiku
    Grant TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
    TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
    TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryCH
    Keywords band-pass filter of signal electrons * SE detection * trajectory simulations
    URLhttps://www.mdpi.com/1996-1944/12/14/2307/htm
    Permanent Linkhttp://hdl.handle.net/11104/0299576
     
Number of the records: 1  

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