kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation

Number of the records: 1

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SYSNO	0487982
Title	kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation
Author(s)	Endo, Akira (FZU-D)_RID Smrž, Martin (FZU-D)_{RID, ORCID} Mužík, Jiří (FZU-D)_ORCID Novák, Ondřej (FZU-D)_{RID, ORCID} Chyla, Michal (FZU-D)_{RID, ORCID} Mocek, Tomáš (FZU-D)_{RID, ORCID, SAI}
Source Title	Journal of Micro-Nanolithography MEMS and MOEMS . Roč. 16, č. 4 (2017), s. 1-6
Article number	041011
Document Type	Článek v odborném periodiku
Grant	LO1602 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	GA16-12960S GA ČR - Czech Science Foundation (CSF)
	CZ.02.1.01/0.0/0.0/15_006/0000674, XE - EU countries
	LM2015086 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	739573, XE - EU countries
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	US
Keywords	EUV source * laser produced plasma * FEL * prepulse * thin-disc laser
Permanent Link	http://hdl.handle.net/11104/0282612

Number of the records: 1