Number of the records: 1
Slumping of Si wafers at high temperature
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SYSNO 0481625 Title Slumping of Si wafers at high temperature Author(s) Míka, M. (CZ)
Jankovský, O. (CZ)
Šimek, P. (CZ)
Lutyakov, O. (CZ)
Havlíková, R. (CZ)
Šofer, Z. (CZ)
Hudec, René (ASU-R) RID, ORCID
Pína, L. (CZ)
Inneman, A. (CZ)
Švéda, L. (CZ)
Maršíková, V. (CZ)Source Title Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III. - Bellingham : SPIE, 2013 / Juha L. ; Bajt S. ; London R. ; Hudec R. ; Pína L. Conference Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 15.04.2013-18.04.2013, Praha Document Type Konferenční příspěvek (zahraniční konf.) Institutional support ASU-R - RVO:67985815 Language eng Country US Keywords silicon * x-ray telescope * thermal forming Permanent Link http://hdl.handle.net/11104/0277159
Number of the records: 1