Effect of axial aberrations on the degree of coherence in SEM

Number of the records: 1

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SYSNO	0480603
Title	Effect of axial aberrations on the degree of coherence in SEM
Author(s)	Řiháček, Tomáš (UPT-D)_{RID, ORCID} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Source Title	Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons 2017 (SIMDALEE2017). Book of Abstracts.. S. 50. - Wien : Institut für Angewandte Physik, 2017
Conference	SIMDALEE2017. Sources, Interaction with Matter, Detection and Analysis of Low Energy Electrons, 18.09.2017 - 22.09.2017, Pula
Document Type	Abstrakt
Grant	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
	606988, XE - EU countries
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	AT
Keywords	axial aberrations * SEM
Permanent Link	http://hdl.handle.net/11104/0276339

Number of the records: 1