Number of the records: 1

Simulations and measurements in scanning electron microscopes at low electron energy

SYSNO	0467245
Title	Simulations and measurements in scanning electron microscopes at low electron energy
Author(s)	Walker, C. (GB) Frank, Luděk (UPT-D)_{RID, SAI, ORCID} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Source Title	Scanning. Roč. 38, č. 6 (2016), s. 802-818
Document Type	Článek v odborném periodiku
Grant	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	606988, XE - EU countries
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	US
Keywords	Monte Carlo modeling * scanned probe * computer simulation * electron-solid interactions * surface analysis
Permanent Link	http://hdl.handle.net/11104/0265392

Number of the records: 1