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Nanopatterning of Silicon Nitride Membranes
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SYSNO 0464387 Title Nanopatterning of Silicon Nitride Membranes Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Řiháček, Tomáš (UPT-D) RID, ORCID
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Urbánek, Michal (UPT-D) RIDCorespondence/senior Matějka, Milan - Korespondující autor Source Title NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. S. 709-714. - Ostrava : Tanger, 2017 Conference NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./, 19.10.2016 - 21.10.2016, Brno Document Type Konferenční příspěvek (zahraniční konf.) Grant TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Language eng Country CZ Keywords e-beam writer * silicon nitride membranes * nano patterning * anisotropic etching Permanent Link http://hdl.handle.net/11104/0270768
Number of the records: 1