Measurements of current density distribution in shaped e-beam writers

Number of the records: 1

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SYSNO	0454665
Title	Measurements of current density distribution in shaped e-beam writers
Author(s)	Bok, Jan (UPT-D)_RID Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Urbánek, Michal (UPT-D)_RID Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Krzyžánek, Vladislav (UPT-D)_{RID, ORCID, SAI}
Source Title	Microelectronic Engineering. Roč. 149, JAN 5 (2016), s. 117-124. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	GA14-20012S GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	NL
Keywords	shaped e-beam writer * electron beam * current density
Permanent Link	http://hdl.handle.net/11104/0255378

Number of the records: 1