Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system

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SYSNO	0454568
Title	Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
Author(s)	Taylor, Andrew (FZU-D)_{RID, ORCID} Ashcheulov, Petr (FZU-D)_{ORCID, RID} Čada, Martin (FZU-D)_{RID, ORCID, SAI} Fekete, Ladislav (FZU-D)_{RID, ORCID} Hubík, Pavel (FZU-D)_{RID, ORCID} Klimša, Ladislav (FZU-D)_ORCID Olejníček, Jiří (FZU-D)_{RID, ORCID} Remeš, Zdeněk (FZU-D)_{RID, ORCID} Jirka, Ivan (UFCH-W)_{RID, ORCID} Janíček, P. (CZ) Bedel-Pereira, E. (FR) Kopeček, Jaromír (FZU-D)_{RID, ORCID} Mistrík, J. (CZ) Mortet, Vincent (FZU-D)_{RID, ORCID}
Source Title	Physica Status Solidi A : Applications and Materials Science. Roč. 212, č. 11 (2015), s. 2418-2423. - : Wiley
Document Type	Článek v odborném periodiku
Grant	GA13-31783S GA ČR - Czech Science Foundation (CSF)
	CZ.2.16/3.1.00/21568, XE - EU countries
	LO1409 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	FZU-D - RVO:68378271 ; UFCH-W - RVO:61388955
Language	eng
Country	DE
Keywords	diamond * electrical conductivity * nanocrystalline materials * optical emission spectroscopy * plasma enhanced chemical vapour deposition * SiC
Permanent Link	http://hdl.handle.net/11104/0255231

Number of the records: 1